<%@LANGUAGE="VBSCRIPT" CODEPAGE="1252"%> MEMS TECHNOLOGY ROADSHOW 2007 - EMBRACING THE FUTURE
 
MEMS TECHNOLOGY ROADSHOW 2007 / EMBRACING THE FUTURE
Discover the latest developments in MEMS fabrication at our FREE events on the following dates:

The Roadshow will held at the following venues:

GRENOBLE - Monday 24th September 2007
(12:30-18:00)
Mercure Grenoble Alpha Meylan
34, Avenue de Verdun
38240 MEYLAN, GRENOBLE
(Evening cocktails and Hors D'eouvres from 5pm )
(click here to download the agenda)

EINDHOVEN - Wednesday 26th September 2007
(9:00-15:00)
Philips Electronics Nederlands B.V.
Conference Center High Tec Campus Eindhoven
High Tec Campus 1c, 5656 AE Eindhoven
(Lunch Buffet 12:30pm)

COPENHAGEN - Thursday 27th September 2007
(09:00 - 13:30)
Hilton Copenhagen Airport
Ellehammersvej 20, Copenhagen, Denmark 2770
(Breakfast Buffet from 8am)
(click here to download the agenda)

Numbers are limited so if you would like to join us, please reserve your place by registering below:
I would like to attend:
 
First Name:
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Company or Organisation:
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or email: registration@memsroadshow.com
     
Primaxx   Primaxx is the world leader in reduced ressure, residue-free MEMS dry etch release, a critical buried oxide etch step which "releases" the moving components of challenging MEMS device designs. Primaxx designs, manufactures, and markets the broadest range of MEMS dry etch release products, from lab systems to multi-chambered cluster tools for high volume
production.
  We will be discussing the features and benefits of dry release etching using HF/alcohol vapor and describing the latest advances in process and hardware capabilities.
  www.primaxxinc.com
Surface Technology Systems   Surface Technology Systems plc is a leading manufacturer of plasma etch and deposition equipment for MEMS, Advanced Packaging, optoelectronics, Compound Semiconductors and Data Storage applications.
   STS will present the latest developments in deep reactive ion etching (DRIE) for silicon micromachining, with details about recent improvements to equipment hardware and processing capabilities.
    www.stsystems.com      
  SUSS MicroTec is a global supplier of semiconductor processing and test equipment for MEMS, Advanced Packaging, Nanotechnology, SOI and emerging markets.   SUSS will present technical papers on advances in MEMS and 3-D technology including state-of-the-art wafer bonding, lithography solutions for thick resist applications and spray coating, precision assembly using flip chip bonding and custom test solutions for MEMS sensors.
    www.suss.com    
XACTIX   XACTIX is the world leader in supplying equipment for highly selective, gas phase, isotropic etching of silicon. This process, using xenon difluoride gas, is ideal for releasing MEMS since it can achieve high etch rates over long undercuts even through very small openings and very thin sacrificial layers. It is highly selectivity to silicon versus most semiconductor films, including photoresist, silicon dioxide, silicon nitride and aluminum.   XACTIX will present numerous examples, both academic and commercial, of the state of the art in releasing MEMS using silicon as a sacrificial layer. In addition XACTIX will discuss the use of Mo and Ge as sacrificial materials, its latest research on improving selectivity, and describe the latest advances in process and equipment.
  www.xactix.com
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